ASML SVG 90-S I-Line Coater/Developer Track 200mm wafers

Includes Operating system

Manufacturer: ASML/SVG

Model: 90-S I-Line

Wafer size: 200mm

104" stand-alone cabinet

4 serial arms and 1 90SE serial arm

Local exhausted cabinet locations

Floor is solid SS spill containment with overflow sensors

Control Module on CES (left or right-integrated)

MCE on CES

Rear-pull interface for Nikon B11/12 stepper

208 volts, 3 phase, 60Hz

SECS I/II interface

Coater/Developer direct floor drain (Tee in cabinet)

Full/clogged drain sensor on each coater

Full SEMI S2-93 Containment for solvent/pump drawer enclosures, bulkhead

Facility sensors for vacuum generators, DI water and caustic exhaust

Coater- quantity 2

    Photoresistant Temperature control

    Air Temp/Humidity control

    Dispense line ID (nozzle tip=3/16")

    1 SS non-coated 3 gallon un-pressurized vessel with Kalrez o-rings and 4 liquid level sensors

    0.1µm solvent filter per canister

    TEBR, BEBR, SVB-25cc Millipore unfiltered pump (subject to availability)

Solvent filter between bulk fill valve and Canister

Developer-quantity 2

    0.1µm Develop filter

    Air Temperature/Humidity Controller

    High flow(2 stream) nozzle on center

    1 SS Tefzel-coated 3 gallon pressurized canister with Kalrez o-rings and 4 liquid level sensors

Vacuum Bake Ovens, stacked-quantity 6

Vapor Prime Ovens, stacked-quantity 2

    Quick disconnects HMDS canister (no exposure)

    Air Venturi, 2 modules/Venturi

    SS, non-coated, 2 gallon, Kalrez o-rings, 2 level sensors, DOT canisters in chemical cabinets

Chill Plates-quantity 3

This ASML/SVG 90-S I-Line Coater/Developer Track system is used, operable surplus. The coater is complete and removed from Fab. It was purchased from a reputable company known for its excellent quality of high maintenance standards. The system is packed in heat-treated crates and is ready to ship overseas. The stock photos pictured in the ad are for reference.

Sold as is complete

TERMS AND CONDITIONS
Shipping: Buyer pays for actual shipping charges from 87107.  Pallet or crating fees may apply.  Item will be shipped within 5 business days after payment is received.  We use UPS Ground Service for small parcels.

Returns: Items are guaranteed for 7 days after receipt, unless specified on the ad that they are sold as-is.  Shipping fees and return shipping fees are non-refundable.

PAYMENT INFORMATION
We accept the following forms of payment:
PayPal - Money Orders -  Personal Checks - Company Checks (For Checks, allow 7 business days to clear bank)

Payment: Payment must be received within 7 business days after order is confirmed (unless prior arrangements are made), or the winning bid will automatically be voided.

If you wish to send a check or money order, please send payment to:

Used Equipment Sales, LLC
4402 2^nd Street, NW
Albuquerque, NM   87107
United States
505-345-8732

OUR BUSINESS HOURS :
(Mountain Standard Time- USA)
Monday - Friday 8:30 AM - 5:00 PM Mountain Standard Time
Closed Saturday, Sunday and all major US holidays.

PROFESSIONAL GUARANTEE

Used Equipment Sales prides itself on customer service.  We guarantee our products to be non-DOA (unless specified in the ad).  If you have any questions, just email or call us. PayPal Verified so BID WITH CONFIDENCE

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