The 4140B Picoammeter/DC Voltage Source is a C-V component-measurement instrument. It consists of an extremely stable picoampere meter and two programmable DC Voltage sources, one of which operates as a ramp and staircase generator as well as a DC Source. The two voltage sources have ranges of ±100 V. These features make the 4140B ideal for making DC characteristic measurements such as leakage current, current-voltage characteristics and quasi-static C-V measurements required by the semiconductor industry for new product development and for improving production yields.

Features

• 3 basic semiconductor measurements: I, I-V and quasi-static C-V
• Two programmable voltage sources
• High resolution: 0.001 x 10-12 A
• HP-IB standard
• Stable pA Measurements, Maximum resolution of 10-15 mA
• Low noise test leads, and an electrostatic and light shielded test fixture
• Synchronized I-V Measurements
• Quasi-Static C-V Measurements
• HP-IB Capability

Specifications

• Measurement Functions: I, I-V and C-V
• Voltage Sources: two separate sources (VA and VB)
  VA: ± 100V programmable source/function generator
  VB: ± 100V programmable dc voltage source

Current Measurements

• Displays: current, 3½ digits with 2 character annunciator.  Voltage, 3½ digits
• Measurement range: ±0.001 x 10-12 A to 1.000 x 10-2 A full scale in 11 ranges
• Overrange capability: 99.9% on all ranges
• Offset range: 0 to ± 100 x 10-15 A
• Trigger: INT, EXT and HOLD/MAN
• Input terminal: triaxial

Capacitance-Voltage (C-V) Measurement

• Measurement ranges: 0.0 pF - 100.0 pF and 200 pF - 1000 pF full scale in two ranges
• % C: capacitance change of device under test is displayed as a percent of the set value of the oxide capacitance (Cox = 100%)
• %C range: 0.0% - 199.9%
• Cox setting ranges (2 ranges): 0.1 pF - 199.9 pF and 200 pF - 1999 pF
• Offset range: 0 to 100 pF