Lam Research 200mm Poly Plasma Etcher 4420

Inventory #5747

This Lam Research plasma etcher is used surplus which came from a World Class Semiconductor Manufacturing Company known for keeping its tools well maintained. The physical condition is very good and very clean, but there are signs of wear and there is some process residue in the exhaust port. It includes transfer arms, gas modules, power supplies, cover panels, and a Lam ENI RF generator cart, temperature control unit(chiller), two Edwards vacuum pumps (iQ series), pump rack, power box, and various cables. This model has an upper match, and the lower electrode is grounded. It is a complete tool.

The etcher was tested and the report is listed below.

LAM RESEARCH RAINBOW

Model 4420B SYSTEM TEST REPORT

The following information was collected during actual system power up checkout. The system was completely facilitated to include a Lam 2080 chiller, Remote AC power distribution panel, Lam remote RF cart, Edwards pump system and associated cabling all of which are included with the sale of this system. Additional information about this is detailed below. The following tests were all performed by James Dixon of Endeavor Technologies a qualified Lam Research Trained, Senior Field Service Engineer. Reports as well as data were collected and prepared for Used Equipment Sales, LLC located at their facility in Albuquerque, New Mexico.

Manufacturer: LAM RESEARCH Corporation

Model: RAINBOW 4420

Serial Number: 20249

Wafer Size Configuration: 8 inch

Additional Auxiliary Support Equipment included

Lam Remote AC Box. This is the main power distribution panel for the system. This is a 208VAC 3phase 5wire 100 AMP configuration. There are 3 power receptacles to provide power connections to the Main system, RF cart and Chiller. Pump power connection goes through panel for direct connection to circuit breaker. Lam Part number is 685-017705-005

LAM 2080 Dual Channel Chiller.  This Lam research Chiller is in excellent shape. Lam part number is 852-110198-020 and the serial number is MSPR0031695.

Lam Remote RF cart. The remote RF cart has the ENI OEM-650A RF generator serial number 5294 and has been checked out for operation. The Lam part number is 852-014681-583 and the serial number is 0900B.

Edwards pump package

Interconnect cable identification and part numbers.

1.     Dual Channel Interface cable PN 853-017962-050

2.     RF Generator/ TCU Signal cable PN 853-017922-050

3.     RF generator COAX RF cable PN 853-017805-045

4.     RF generator cart EMO cable PN 853-017825-050

5.     TCU interface Cable PN 853-017964-020

6.     TCU EMO cable PN 853-017824-020

7.     Etcher Power cable PN 853-017810-020

8.     RF Generator Power Cable PN 853-017816-020

9.     TCU Power Cable PN 853-017816-020

System Power up Details.

1.     3 Phase power checks completed all within specification.

Phase X=125.8 VAC, Phase Y=125.6 VAC, Phase 125.8VAC

2.     Power Supply voltages

VME DC Voltages                                                       Measured

-12VDC…………………………………………….-12.25VDC

+12VDC…………………………………………...+12.29VDC

+5VDC……………………………………………...+5.28VDC

I/O DC Voltages

+24 VDC…………………………………………..+24.14VDC

+15VDC…………………………………………...+15.19VDC

-15VDC…………………………………………….-15.13VDC

+5VDC……………………………………………...+4.96VDC

System Tests Actions                                                  Results

1.     System power on…………………………………..…Passed

2.     System boot up…………………………………...…. Passed

3.     Send indexer operation……...……………………..... Passed

4.     Load station shuttle……………………………...…..  Passed

5.     Edge detector initialization………………………...... Passed

6.     Load point lifter operation………………………...… Passed

7.     Entrance load lock outer door operation.…………..... Passed

8.     Entrance load lock vacuum ISO valve operation…..... Passed

9.     Entrance load lock soft pump valve operation………. Passed

10.                         Entrance arm drive initialization……………………. Passed

11.                         Entrance load lock Inner door operation……………. Passed

12.                         Chamber gap drive initialization……………………. Passed

13.                         Chamber 4 Pin Lifter operation……………………... Passed

14.                         Exit load lock inner door operation…………………. Passed

15.                         Exit load lock Vacuum ISO valve operation…….…...Passed

16.                         Exit load lock Soft pump valve operation…………....Passed

17.                         Exit load lock Arm drive initialization……………….Passed

18.                         Exit load lock outer door operation…………………. Passed

19.                         Receive indexer operation…………………………... Passed

20.                        Wafer alignment ……………………………………...Passed

21.                         Manual wafer transfer test…………………………....Passed

22.                         Upper electrode cooing leak checks………………….Passed

23.                         Lower electrode cooling leak checks…………………Passed

24.                         Main Chamber vacuum integrity < 3.0mt/min………. Passed

25.                         Entrance load lock leak rate =15.8mt/min…………....Failed*

26.                         Exit load lock leak rate =25.6mt/min….……………...Failed*

27.                         Chamber Heaters…………………………………….. Passed

28.                          Main chamber ISO valve heater…………………….. Passed

29.                         Chamber throttle valve heater……………………...… Passed

30.                          Chamber vacuum manifold heater……………………Passed

31.                         Pump line manifold heater…………………………….Passed

*note: Item 25 & 26 requires further investigation or longer pump down time.

General Machine Information

Upper RF match gear driven part number …………….853-015130-003

Lower RF match gear driven part number …………….NA top power only

Send and Receive indexers are Hine 38A with ergonomic assist loaders.

Operating system type is Classic

Software Version is Special 855-10499-455 Rev E1.

AC/DC power distribution box is Breaker type -002.

Entrance load lock Arm calibration checks

ELL Arm Rotate to chamber counts……………………………… 940

ELL Arm Extend to chamber counts………………………………..1005

ELL Arm Rotate to load point counts……………………………...1000

ELL Arm Extend to load point counts………………………………990

Exit load lock Arm calibration checks

XLL Arm Rotate to chamber counts……………………………….. .985

XLL Arm Extend to chamber counts………………………………...994

XLL Arm Rotate to load point counts……………………………...1005

XLL Arm Extend to load point counts……………………………..1010

Gas delivery MFC configuration

Gas #1 Tylan model FC-2900………………………………….500 Sccm Helium 

Gas #2 Tylan model FC-2900………………………………….500 Sccm Argon

Gas #3 Tylan model FC-2900………………………………..............50 Sccm O2

Gas #4 Tylan model FC-2900………………………………. …..500 Sccm C2F6

Gas #5 Tylan model FC-2900…………………………………….500 Sccm SF6

Gas # 6 Tylan model FC-2900……………………………………200 Sccm HBR

Gas #7 Tylan model FC-2900…………………………………….500 Sccm CL2

Gas # 8 Tylan model FC-2900……………………………………500 Sccm NF3

Specifications:

• Model No: 4420
• Serial No: 20249
• 208V, 3ø, 50/60Hz, 30A
• 200mm wafers
• ENI OEM-650A RF generator, 852-014681-583, 851-014680-583
• Model No: OEM-6A-11491-52, Serial No: 5375
• Edwards iQDP40 & iQDP80 w/blower
• Lam chiller 2080 TCU, 852-110198-020  Rev.D
• AC power box: 685-017705-005

Sale Details:

• Inventory Number: 5747
• Only items pictured are included - If a part is not pictured, or mentioned in the description, then it is not included in the sale.
• For multiple listed items, the pictured serial number is not necessarily the one that will be sent.
• Complete, Serviceable

SALE TERMS AND CONDITIONS: