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Tegal Plasmaline Super 421 (Operational)

Dual Channel Isotropic Plasma Asher/Etcher		 Item number: 220212439784
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Tegal Plasmaline Super 421 (Operational)
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Buy It Now price: US $4,750.00 

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Ships to:Will arrange for local pickup only (no shipping).
Item location:Temple, TX, United States
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Seller:bfliles( 16Feedback score is 10 to 49)
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Member:since Oct-31-02 in United States
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Description

Item Specifics - Item Condition
Condition:

Used

Manufacturing Category :

Semiconductor & PCB Equipment

Equipment Type :

Plasma Etcher


Logan Semi Equipment
Logan Semi Equipment
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Operational Dual Channel Isotropic Barrel plasma asher/etcher.Two gas inputs.Heated Al chamber. Endpoint. Holds 2 carriers of 4" wafers.

Tool was upgraded with Auto-tune, ENI ACG-5 RF Generator, VAT ISO Valve, and Baratron gauge.

 Available for inspection or Demo.

This tool would make a great Lab Tool.

Includes table. Table and tool size is 25"Wx39"Lx60"H.

Al Chamber inside size is 10"Dx10"Wx5"H.

Power requirements: 115vac 20amps & 208vac 20amps. Weight about 500 lbs.

Vacuum pump not included.

Ships worldwide

FOB: Temple, Texas.  Buyer pays crating and shipping.

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Item title: Tegal Plasmaline Super 421 (Operational)
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