ULVAC
VACUUM SYSTEM
This Vacuum System was operated in SAMSUNG site in Budapest, Hungary.
Used vacuum pump system made by ULVAC Japan.
Each system contains components as follows:
1) Oil rotary vacuum pump PKS
series model PKS-016
2) Mechanical booster pump PRC-A
series model PMB-003CM
Technical
Data
Oil Rotary Vacuum Pumps (technical information from
ULVAC website)
PKS Series Oil Rotary Vacuum Pumps
(1,600 to 7,000 l/min)
The PKS Series are large oil rotary vacuum pumps that are
extremely solid and have stable evacuation characteristics. They are used in
many applications, in areas ranging from the metal and automotive industries,
to the chemical, pharmaceutical and food industries.
Features
- Kinney 1-phase structure is
solid and has long life.
- Made from high-grade cast
metal, for outstanding abrasion and corrosion resistance
- Extremely easy to disassemble
and assemble. Evacuation valve inspection is also easy.
Specifications
|
Model
|
PKS-016
|
PKS-030
|
PKS-070
|
|
Design evacuation speed
|
m3/h(L/min)
|
96(1600)
|
180(3000)
|
420(7000)
|
|
Final pressure (Pa) (*1)
|
Pa
|
2.7
|
|
Motor (*2)
|
kW(number of poles)
|
2.2(4P)
|
3.7(4P)
|
11(6P)
|
|
Required oil volume
|
L
|
6.5
|
8.0
|
20.0
|
|
Oil (*3)
|
ULVOIL R-7
|
|
Cooling method
|
Air-cooled
|
Water-cooled
|
|
Cooling water
|
Flow rate (l/min)
|
-
|
3
|
5
|
|
Pressure (MPa)
|
-
|
Gauge pressure :
0.3 max.
|
|
Outlet/inlet
differential pressure (MPa)
|
-
|
Gauge pressure :
0.1 max.
|
|
Temperature (ºC)
|
-
|
5 to 30
|
|
Intake size
|
JIS B 2290
|
VG50 size
|
VG80 size
|
VG100 size
|
|
Vent size
|
JIS B 2290
|
VG50 size
|
VG80 size
|
VG100 size
|
|
Weight
(pump + base)
|
kg
|
225
|
380 (pump only)
|
900 (pump only)
|
|
External dimensions
|
Total length x
total width x total height (mm)
|
860 x 595 x 550
|
680 x 720 x 900
|
950 x 970 x 1145
|
|
Standard accessories
|
Operating instructions (1 copy), base bolts (4),
oil for 1 motor, motor pulley (1)
|
|
Options
|
TM-2 oil mist trap
|
TM-3 oil mist trap
|
TM-4 (S) oil mist trap
|
|
Note:
|
This catalog uses SI measurement units. Conversion to
non-SI units is as follows :
Final pressure : 2.7 Pa = 2 x 10-2 torr; Water pressure: 0.3 MPa =
3 kg/cm2
|
|
*1
|
Measured by Pirani vacuum gauge (about 6.7 x 10-1
Pa with MacLeod vacuum gauge)
|
|
*2
|
When ordering, specify whether you require a motor, and if
you do, specify its type, voltage and frequency. Totally enclosed fan-cooled
flange motors, increased safety flange motors, and explosion-proof flange
motors are available as options.
|
|
*3
|
Other oil types are available. Contact ULVAC's Sales
Department.
|
Mechanical
Booster Pumps (technical information from ULVAC website)
PMB-B/C Series Mechanical
Booster Pumps
By using them together
with dry pumps, oil rotary vacuum pumps or water-sealed pumps, mechanical
booster pumps can increase the evacuation speed in the 1 kPa to 0.1 Pa range,
where rough pump evacuation speed drops. The models in the PRC-A Series are the
successors to ULVAC's PMB-006C(M),
and PMB-012C(M)
models. Like the PMB-C(M) Series, they are Roots pumps designed for
general-purpose applications, as well as semiconductor and LC manufacturing
processes that require a highly clean atmosphere inside and outside the pump.
The PMB-C Series is ideal for general-purpose applications and clean
applications. The PMB-B Series is ideal for large-capacity evacuation, such as
for heat treatment furnaces and melting furnaces.
Features
- Oil filter
No lubrication oil in casing chamber, enabling stable
performance for water vapor or solvent vapor. - Corrosion resistance
Major components are Tufram®-processed, for
high surface hardness and outstanding corrosion resistance. Tufram®-processed
components reduce damage and corrosion inside pump. (Tufram®
process is used on PRC-A Series and PMB-C(M) Series.) - PMB-CM/PRC-A (effective at
achieving faster evacuation) can be started at same time as rough pump
driven by atmospheric pressure, enabling faster evacuation than standard
type.
- Evacuation direction
can be selected (PMB-024C(M),
040B, 060B).
Vertical or horizontal evacuation direction can be
selected, for more compact systems with greater design freedom.
Specifications
|
model
Item
|
PMB-001C,CM
|
PMB-003C,CM
|
PRC-003A
|
PRC-006A
|
|
Effective evacuation speed (m3/h(L/min)) (*1)
|
50Hz
|
95
(1580)
|
280
(4670)
|
280
(4670)
|
500
(8330)
|
|
60Hz
|
115
(1920)
|
330
(5500)
|
330
(5500)
|
600
(10000)
|
|
Maximum intake pressure
(Pa; PMB-C only)(*2)
|
50Hz
|
9.3 x 103
|
1.2 x 103
|
1.3 x 103
|
|
60Hz
|
7.3 x 103
|
9.3 x 103
|
1.1 x 103
|
|
Maximum permitted pressure difference (Pa; PMB-C only)(*2)
|
50Hz
|
8.0 x 103
|
4.0 x 103
|
7.3 x 103
|
|
60Hz
|
6.7 x 103
|
3.3 x 103
|
6.0 x 103
|
|
Final pressure (Pa) (*3)
|
4.0 x 10-1
|
|
Supported drive pressure (Pa) (*4)
|
to 1.0 x 105
(PRC-A,PMB-CM)
|
|
Motor power (kW)
(number of poles) (*5)
|
0.4(2)
|
0.75(2)
|
2.2(2)
|
|
Oil (*6)
|
ULVOIL R-4
|
|
Required oil amount (L) (*7)
|
0.35
|
0.7
|
1.5
|
|
Cooling water
|
Cooling method
|
Air-cooled
|
Air-cooled,
water-cooled
|
Water-cooled
|
|
Primary pressure
(MPa)
|
-
|
0.3
|
|
Outlet/inlet
differential pressure (MPa)
|
-
|
0.05
|
0.01
|
|
Flow rate (l/min)
|
-
|
2
|
|
Temperature (ºC)
|
-
|
5 to 30
|
|
Intake size (JIS B 2290)
|
VG50 size
|
VG80 size
|
VG100 size
|
|
Vent size (JIS B 2290)
|
VF50 size
|
VF80 size
|
|
External dimensions (L x W x H; mm)
|
217 x 529 x 180
|
290 x 656 x 260
|
296 x 565 x 260
|
356 x 619 x 320
|
|
Weight (kg) (*8)
|
22(23)
|
46(48)
|
51(54)
|
86(90)
|
|
Standard auxiliary pump
|
EC403
|
EC603
|
EC803
|
|
Options
|
-
|
1.5 kW motors (2)
|
Atmospheric
pressure drive type
|
|
Lubrication chamber
evacuation support
|
|
|
|
|
|
|
|
|
Model
Item
|
PRC-012A
|
PMB-024C,CM
|
PMB-040B
|
PMB-060B
|
|
Effective evacuation speed
(m3/h (l/min)) (*1)
|
50Hz
|
1000
(16700)
|
2000
(33300)
|
3800
(63300)
|
6200
(103300)
|
|
60Hz
|
1200
(20000)
|
2400
(40000)
|
|
Maximum intake pressure
(Pa; PMB-C only) (*2)
|
50Hz
|
1.3 x 103
|
8.0 x 102
|
1.3 x 103
(5 minutes or less at startup)
8.0 x 102
(during continuous operation)
|
|
60Hz
|
1.1 x 103
|
6.7 x 102
|
|
Maximum permitted pressure difference (Pa; PMB-C only)
(*2)
|
50Hz
|
7.3 x 103
|
5.6 x 103
|
-
|
-
|
|
60Hz
|
6.0 x 103
|
4.7 x 103
|
|
Final pressure (Pa) (*3)
|
6.7 x 10-1
|
|
Supported drive pressure (Pa) (*4)
|
to 1.0 x 105
(PRC-A,PMB-CM)
|
|
Motor power (kW) (number of poles) (*5)
|
3.7(2)
|
7.5(2)
|
15(4)
|
18.5(4)
|
|
Oil (*6)
|
ULVOIL R-4
|
|
Required oil amount (L) (*7)
|
1.9
|
4.5(2.8)
|
6.5
|
|
Cooling water
|
Cooling method
|
Water-cooled
|
|
Primary pressure
(MPa)
|
0.3
|
0.1 to 0.2
|
|
Outlet/inlet
differential pressure (MPa)
|
0.01
|
0.05
|
|
Flow rate (l/min)
|
3
|
24
|
|
Temperature (ºC)
|
5 to 30
|
|
Intake size (JIS B 2290)
|
VG100 size
|
VG200 size
|
VG250 size
|
VG300 size
|
|
Vent size (JIS B 2290)
|
VF80 size
|
VF200 size
|
VF150 size
|
VF200 size
|
|
External dimensions (L x W x H; mm)
|
406 x 759 x 340
|
540 x 1237 x 470
|
764 x 1230 x 707
|
764 x 1470 x 707
|
|
Weight (kg) (*8) (*9)
|
118(123)
|
260(272)
|
950
(without motor)
|
1150
(without motor)
|
|
Standard auxiliary pump
|
VS1501
|
PKS-070
|
PKS-070 x 2
|
|
Options
|
Atmospheric
pressure drive type
|
11 kW motors (2)
|
Bypass valve,
piping
|
|
Lubrication chamber
evacuation support
|
-
|
-
|
|
|
|
|
|
|
|
|
Note :
|
This catalog uses SI measurement units. Conversion to
non-SI units is as follows :
Final pressure : 4.0 x 10-1 Pa = 3.0 x 10-3 torr
Pressure: 0.05/0.1/0.2/0.3 MPa = 0.5/1/2/3 kgf/cm2
|
|
*1
|
Measured value at 13 Pa
|
Track up to 10 items on this computer in 
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